ATMOSPHERIC TEOS/OZONE CVD SYS
ATMOSPHERIC TEOS/OZONE CVD SYS
model:APT-5800
Vendor:CANON
Condition: used semiconductor equipment
M2I
Deposition Metal Sputtering and Evaporation (PVD) System,
A2 - Etch w/ Comdel CPS1001 RF power supply,
A3 - Cobalt w/ Varian Multi Range DC Power Supply 3-12kW,
A4 - Ti/TTN w/Varian Multi Range DC Power Supply 6-24kW,
A5 - Al w/ Varian Multi Range DC Power Supply 3-12kW,
A6 -Ti/TTN w/Varian Multi Range DC Power Supply 3-12kW,
CTI Cryogenics 9600 Compressors (qty 4),
Neslab Coolflow System IV 230V 3 phase,
and Infincon CIS TS100 RGA units on A2-A6 and transfer.
(All workbenches, flat panel monitors and various nonrelated items in photos may not be included)
A2 - Etch w/ Comdel CPS1001 RF power supply,
A3 - Cobalt w/ Varian Multi Range DC Power Supply 3-12kW,
A4 - Ti/TTN w/Varian Multi Range DC Power Supply 6-24kW,
A5 - Al w/ Varian Multi Range DC Power Supply 3-12kW,
A6 -Ti/TTN w/Varian Multi Range DC Power Supply 3-12kW,
CTI Cryogenics 9600 Compressors (qty 4),
Neslab Coolflow System IV 230V 3 phase,
and Infincon CIS TS100 RGA units on A2-A6 and transfer.
(All workbenches, flat panel monitors and various nonrelated items in photos may not be included)
